Design of a full-filed transmission X-ray microscope with 30nm resolution

作者： Keliang Liao ¹ Qili He ² Panyun Li ¹ Maohua Song ¹ Peiping Zhu ^1,2
作者单位：

1. Institute of High Energy Physics, Chinese Academy of Sciences

2. Jinan Hanjiang Opto-electronics Technology Ltd.
通讯作者： Keliang Liao Email:hjoptech@163.com Peiping Zhu Email:zhupp@ihep.ac.cn
提交时间：2023-11-15 18:35:24

摘要: A full-field transmission hard X-ray microscope (TXM) with 30nm resolution was designed and its prototype was constructed. The TXM relies on a compact, high stiffness, low heat dissipation and low vibration design philosophy and utilizes Fresnel Zone plate (FZP) as imaging optics. The design of the TXM was introduced in detail, including the optical layout, the parameters of the FZP, the mechanical design of the TXM instrument. Preliminary imaging result with 52nm spatial resolution was achieved.

X-ray imaging zone plate microscopy precision instrument

来自： 廖可梁
分类： 光学 >> 显微镜
说明： Presented at FOI2023
投稿状态： 已被会议呈现
引用： ChinaXiv:202311.00232 (或此版本 ChinaXiv:202311.00232V1)
DOI:10.12074/202311.00232V1
CSTR:32003.36.ChinaXiv.202311.00232.V1
推荐引用方式： Keliang Liao,Qili He,Panyun Li,Maohua Song,Peiping Zhu.(2023).Design of a full-filed transmission X-ray microscope with 30nm resolution.null.[ChinaXiv:202311.00232] (点此复制)

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[V1]

2023-11-15 18:35:24

ChinaXiv:202311.00232V1

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