分类: 光学 >> 量子光学 提交时间: 2023-02-19
摘要: Limited by the cost and complexity, superresolution lithography is hard to achieve through the traditional interference lithography. We here developed the plasmonic interference lithography technique by using a hyperbolic metamaterials (HMMs) / photoresist / metal plasmonic waveguide to push the feature sizes theoretically down to 16 nm and even to 11 nm at the wavelength of 365 nm with TM polarization. The waveguide based on the proposed HMMs can support high-k mode for superresolution lithography. Furthermore, plasmonic mode supported in the proposed lithography structure can be tailored by dimension of HMM and permittivity of the materials, which makes it possible to get higher resolution pattern under conventional UV light. Our findings open up an avenue to pushing the nanolithography node towards 10 nm for low-cost and large area fabrication under conventional UV light source.
分类: 光学 >> 量子光学 提交时间: 2023-02-19
摘要: An on-chip multi-grating device is proposed to interface single-atoms and integrated photonic circuits, by guiding and focusing lasers to the area with ~10um above the chip for trapping, state manipulation, and readout of single Rubidium atoms. For the optical dipole trap, two 850 nm laser beams are diffracted and overlapped to form a lattice of single-atom dipole trap, with the diameter of optical dipole trap around 2.7um. Similar gratings are designed for guiding 780 nm probe laser to excite and also collect the fluorescence of 87Rb atoms. Such a device provides a compact solution for future applications of single atoms, including the single photon source, single-atom quantum register, and sensor.
分类: 光学 >> 量子光学 提交时间: 2023-02-19
摘要: The hybrid photon-atom integrated circuits, which include photonic microcavities and trapped single neutral atom in their evanescent field, are of great potential for quantum information processing. In this platform, the atoms provide the single-photon nonlinearity and long-lived memory, which are complementary to the excellent passive photonics devices in conventional quantum photonic circuits. In this work, we propose a stable platform for realizing the hybrid photon-atom circuits based on an unsuspended photonic chip. By introducing high-order modes in the microring, a feasible evanescent-field trap potential well $\sim0.3\,\mathrm{mK}$ could be obtained by only $10\,\mathrm{mW}$-level power in the cavity, compared with $100\,\mathrm{mW}$-level power required in the scheme based on fundamental modes. Based on our scheme, stable single atom trapping with relatively low laser power is feasible for future studies on high-fidelity quantum gates, single-photon sources, as well as many-body quantum physics based on a controllable atom array in a microcavity.