分类: 光学 >> 量子光学 提交时间: 2023-02-19
摘要: Photolithography assisted chemo-mechanical etching (PLACE), a technique specifically developed for fabricating highquality large-scale photonic integrated circuits (PICs) on thin-film lithium niobate (TFLN), has enabled fabrication of a series of building blocks of PICs ranging from high-quality (high-Q) microresonators and low-loss waveguides to electrooptically (EO) tunable lasers and waveguide amplifiers. Aiming at high-throughput manufacturing of the PIC devices and systems, we have developed an ultra-high-speed high-resolution laser lithography fabrication system employing a high repetition rate femtosecond laser and a high-speed polygon laser scanner, by which a lithography fabrication efficiency of 4.8 cm2/h has been achieved at a spatial resolution of 200 nm. We demonstrate wafer-scale fabrication of TFLN-based photonic structures, optical phase masks as well as color printing
分类: 光学 >> 量子光学 提交时间: 2023-02-19
摘要: We demonstrate ultra-high Q factor microring resonators close to the intrinsic material absorption limit on lithium niobate on insulator. The microrings are fabricated on pristine lithium niobate (LN) thin film wafer thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching. A record-high Q factor up to times ten to the power of 8th at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion induced lattice damage, indicating an ultra-low waveguide propagation loss of about 0.28 dB per meter. The ultra-high Q microrings will pave the way for integrated quantum light source, frequency comb generation, and nonlinear optical processes.
分类: 光学 >> 量子光学 提交时间: 2023-02-19
摘要: We demonstrate an on-chip single-mode Er3+-doped thin film lithium niobate (Er: TFLN) laser which consists of a Fabry-P\'erot (FP) resonator based on Sagnac loop reflectors (SLRs). The fabricated Er: TFLN laser has a footprint of 6.5 mmx1.5 mm with a loaded quality (Q) factor of 1.6x105 and a free spectral range (FSR) of 63 pm. We generate the single-mode laser around 1550-nm wavelength with a maximum output power of 44.7 {\mu}W and a slope efficiency of 0.18 %.
分类: 光学 >> 量子光学 提交时间: 2023-02-19
摘要: Integrated on-chip microdisk lasers have attracted great attention as a light source of compact size, low lasing threshold and narrow bandwidth. However, challenges remain unresolved in terms of single mode operation at high output power while maintaining the ultra-narrow bandwidth. In this work, we demonstrate monolithically integrated on-chip single-frequency microdisk lasers coupled with bus-waveguides fabricated by photolithography assisted chemo-mechanical etching. Owing to the high-Q factor of a polygon whispering gallery mode formed in the microdisk and long cavity lengths (e.g., 409 um and 1 mm), a microdisk laser with a narrow linewidth of 0.11 MHz and a maximum output power of 62.1 uW has been achieved at room temperature.
分类: 光学 >> 量子光学 提交时间: 2023-02-19
摘要: We demonstrate an electrically driven compact hybrid lithium niobate microring laser by butt coupling a commercial 980-nm pump laser diode chip with a high quality Er3+-doped lithium niobate microring chip. Single mode lasing emission at 1531 nm wavelength from the Er3+-doped lithium niobate microring can be observed with the integrated 980-nm laser pumping. The compact hybrid lithium niobate microring laser occupies the chip size of 3 mmx4mmx0.5 mm. The threshold pumping laser power is 6 mW and the threshold current is 0.5 A (operating voltage 1.64 V) in the atmospheric temperature. The spectrum featuring single mode lasing with small linewidth of 0.05 nm is observed. This work explores a robust hybrid lithium niobate microring laser source which has potential applications in coherent optical communication and precision metrology.